Photopolymerization inhibition dynamics for sub-diffraction direct laser writing lithography
Authors: Harke B., Bianchini P., Brandi F., Diaspro A.
Autors Affiliation: Department of Nanophysics, Istituto Italiano di Tecnologia, Via Morego 30, 16163 Genova, Italy;
Department of Physics, University of Genova, 16146 Genova, Italy
Abstract: Selective inhibition of the polymerization leads to sub-diffraction feature sizes in direct writing lithography-a principle based on the idea of stimulated emission depletion (STED) microscopy. However, the detailed understanding of the inhibition process is a key point to further enhance the resolution of the system. The authors present experiments focused on the time dynamics of the inhibition process, clarifying possible photophysical pathways.
Volume: 13 (6) Pages from: 1429 to: 1434
KeyWords: Lithography; Polymerization; Resolution; Sub-diffraction; Triplet stateDOI: 10.1002/cphc.201200006Citations: 27data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2021-05-09References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here