Tailoring the textured surface of porous nanostructured NiO thin films for the detection of pollutant gases
Authors: Kumar R., Baratto C., Faglia G., Sberveglieri G., Bontempi E., Borgese L.
Autors Affiliation: CNR-INO SENSOR Lab., Via Branze 35, 25133 Brescia, Italy;
University of Brescia, Dept. of Information Engineering, Via Valotti, 9, 25133 Brescia, Italy;
INSTM and Chemistry for Technologies Laboratory, University of Brescia, Department of Mechanical and Industrial Engineering, Via Branze, 38, 25133 Brescia, Italy
Abstract: In the present article, an experimental approach to detect pollutant gases in presence of humidity was applied for gas sensors based on p-type NiO thin films. NiO thin films were deposited by radio frequency magnetron sputtering in inert atmosphere using a NiO target. Thin films were investigated by scanning electron microscopy to observe their surface morphology. Crystal structure and vibrational study were investigated by X-ray diffraction and micro-Raman spectroscopy, respectively. It was observed that deposition temperature played a crucial role in the structural and surface morphology of NiO thin films. Sensing response of the nanostructured thin films to reducing and oxidizing gas was studied as a function of gas concentration and operating temperature. A double digit (12.3) response was observed towards ozone at 200 degrees C, while maximum response to ethanol and acetone was recorded at 400 degrees C. A correlation was established between sensing response and crystalline dimension for ozone sensing. The result showed that NiO thin films can be used as p-type metal oxide material for the fabrication of solid state gas sensors to detect low concentrations of ozone (70 ppb). (C) 2015 Published by Elsevier B.V.
Journal/Review: THIN SOLID FILMS
Volume: 583 Pages from: 233 to: 238
More Information: The research leading to these results has received funding from the European Communities 7th Framework Programme under grant agreement NMP3-LA-2010-246334. Financial support of the European Commission is therefore gratefully acknowledged.KeyWords: Gas sensor; Nickel oxide; p-Type semiconductor; Micro-Raman spectroscopy; Sensing responseDOI: 10.1016/j.tsf.2015.04.004Citations: 32data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2021-10-24References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here