Tailoring and characterization of porous hierarchical nanostructured p type thin film of Cu-Al-Oxide for the detection of pollutant gases
Authors: Kumar R., Baratto C., Faglia G., Sberveglieri G., Vojisavljevic K., Malic B.
Autors Affiliation: SENSOR Lab. CNR-INO and Dept. of Information Engineering, University of Brescia, Via Valotti, 9 25133 Brescia, Italy; bElectronic Ceramics Department, Jozef Stefan Institute Jamova 39, SI-1000, Ljubljana, Slovenia
Abstract: An experimental approach for the detection of harmful gases in presence of humidity has been applied for gas sensors based on p-type Cu-Al-Oxide thin films. The impact of deposition conditions on the surface, morphology and sensing properties of the semiconducting oxide thin films are investigated. Cu-Al-Oxide thin film with higher resistance can be applied as p-type resistive gas sensor for the detection of pollutant gases. Thin films were characterized by X-Ray Diffraction, scanning electron microscope, and Raman spectroscopy. We observed that inert atmosphere and deposition temperature play the important role to affect the structural and surface morphology of Cu-Al-Oxide thin films. Sensitivity of nanostructured thin films towards reducing and oxidizing gas are studied as a function of gas concentration and operating temperature. (c) 2014 The Authors. Published by Elsevier Ltd.
Journal/Review: PROCEDIA ENGINEERING
Volume: 87 Pages from: 252 to: 255
More Information: Delafossite; Cu-Al-Oxide; p-type transparent conducting oxides; gas sensor; RF sputtering;KeyWords: Delafossite; Cu-Al-Oxide; p-type transparent conducting oxides; gas sensor; RF sputtering;DOI: 10.1016/j.proeng.2014.11.651Connecting to view paper tab on IsiWeb: Click here