A cold cesium atom source for Focused Ion Beams and Single Ion Implantation
Authors: Allegrini M., Bruneau Y., Ciampini D., Comparat D., Fioretti A., Fuso F., Guerri I., Kime L., Pillet P., Rasser B., Shayeganrad G., Sudraud P., Viteau M.
Autors Affiliation: Dipart. di Fisica, Univ. di Pisa,and CNISM, Largo Pontecorvo 3, 56127 PISA, Italy,
Lab. Aimé Cotton, CNRS, Un. Paris-Sud, ENS Cachan, Bât. 505, 91405 Orsay, France,
Orsay Physics, 95 Avenue des Monts Aurélien,ZAC Saint Charles, 13710 Fuveau, France,
Istituto Nazionale di Ottica, CNR, U.O.S. Pisa, via Moruzzi 1, 56124, Pisa, Italy
More Information: Here we present two experiments realized within the framework (IAPP grant) of a collaboration among three (two academic and one industrial) partners. In the first one a FIB machine has been realized and used to image and modify different targets with a typical 100nm resolution. In the second one, bunches of low-energy ions, virtually single ones, are extracted and directed onto a detector, trying to establish a protocol for deterministic delivery of single ions. Both experiments are based on the ionization of laser-cooled cesium atom beams.
After this first demonstration of the prototype cold atom-based FIB, further development and engeneering are actually undertaken by the industrial partner.
D.C., F.F. and P.S. acknowledge gratefully the support of the European Union Seventh Framework Program FP7/2007-2013 under Grant Agreement No. 251391 MC-IAPP ”COLDBEAMS”. G.S. and M.V. are Research Fellows hired under this program.
KeyWords: laser cooling; cold atoms; Rydberg atoms; laser ionization; focused ion beams