Analysis of the Actuation of an RF-MEMS by Means of Digital Holography
Authors: Coppola G., Striano V., De Nicola S., Finizio A., Ferraro P.
Autors Affiliation: CNR INO
Abstract: Digital holography is employed as non-contact metrological tool for inspection and characterization of a micromechanical shunt switch for microwave applications. The switch is based on a bridge that is actuated via an electrostatic force generated by a DC voltage signal applied between the bridge and the underneath region. The out-of-plane deformation of the bridge has been investigated during the operational conditions in order to measure the warp in the bridge occurring during its actuation. The results reported in this paper are obtained biasing the RF-MEMS with a voltage ramp with a period of 1s and an amplitude of 30 V. Digital Holography allowed to diagnostic and measure an asymmetric deformation of the device during its actuation.
Volume: 5 Pages from: 175 to: 179
KeyWords: digital holography microscope; memscharacterizayion; micromechanical shunt switches; microwave devide; DOI: 10.1166/jhs.2009.1012