Pyroelectric properties of thin films of sputtered lithium tantalate.

Year: 1984

Authors: D’Amico A., Pertocco G., Lucchesini A., Giannini F.(*)

Autors Affiliation: Istituto di Elettronica dello Stato Solido de1 Consiglio Nazionale delle Ricerche – Roma – Italy;
(*)Università di Tor Vergata – Roma – Italy.

Abstract: Thin films of pyroelectric material have been obtained on stainless-steel and molybdenum substrates by radiofrequency reactive sputtering and using single-crystal lithium tantalate as target. By changing the substrate temperature and the partial pressure of oxygen a variety of different growth conditions have been explored. Films having a dielectric constant and loss comparable to single-crystal values have been achieved and the best value of the pyroelectric coefficient was found to be about four times smaller than that of single-crystal Lithium tantalate.


Volume: 3      Pages from: 33  to: 36

More Information: doi: 10.1016/0167-577X(84)90009-0
KeyWords: lithium tantalate; radiofrequency sputtering; pyroelectric material