Seeing the invisible – ultrasonic force microscopy for true subsurface elastic imaging of semiconductor nanostructures with nanoscale resolution

Year: 2012

Authors: Kolosov O.V., Dinelli F., Krier A., Henini M., Hayne M., Pinque P.

Autors Affiliation: Physics Department, Lancaster University, Lancaster, LA1 4YB, United Kingdom; CNR – INO, Pisa, Italy; School of Physics and Astronomy, University of Nottingham, Nottingham, United Kingdom; Scuola Normale Superiore, Pisa, Italy

Abstract: In this paper we produce first unambiguous SPM images that utilise ultrasonic force microscopy (UFM) approach for imaging of internal morphology of two dissimilar high stiffness solid state nanostructures – 50 nm thick graphite flakes on the patterned substrate and iii-v InAs/GaAs semiconductor quantum dot structures under atomically flat GaAs capping layer. Moreover, by analysing the imaging process, we show that the imaging mechanism in reported so far subsurface imaging methods is indeed the elastic field produced by the indention of dynamically stiffened cantilever-tip system due to high vibration frequency, with detection due to the nonlinear tip-surface interaction.

Conference title:

KeyWords: Atomic force microscopy; Graphene; Nanostructures; Subsurface imaging; Ultrasonic force microscopy

Citations: 1
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