Calibration of absolute planarity flats: generalized iterative approach

Year: 2012

Authors: Vannoni M., Sordini A., Molesini G.

Autors Affiliation: CNR — Istituto Nazionale di Ottica, Largo E. Fermi 6, Firenze 50125, Italy

Abstract: Absolute planarity measurement with interferometric data and iterative surface recovering approaches is briefly reviewed. Extension to the case of multiple measurements is outlined, and demonstration with synthetic data is provided. A generalized approach is finally presented, making use of operators representing the manipulations occurred with the surfaces taking part in the generation of the interferograms. The potential advantages of the new interferogram processing technique are pointed out. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).


Volume: 51 (8)      Pages from: 081510  to: 081510

KeyWords: Generalized iterative approaches; Interferogram processing; Interferograms; Interferometric data; Iterative algorithm; Multiple measurements; Planarity; Synthetic data, Algorithms; Iterative methods, Interferometry
DOI: 10.1117/1.OE.51.8.081510

Citations: 15
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