Calibration of absolute planarity flats: generalized iterative approach
Authors: Vannoni M., Sordini A., Molesini G.
Autors Affiliation: CNR — Istituto Nazionale di Ottica, Largo E. Fermi 6, Firenze 50125, Italy
Abstract: Absolute planarity measurement with interferometric data and iterative surface recovering approaches is briefly reviewed. Extension to the case of multiple measurements is outlined, and demonstration with synthetic data is provided. A generalized approach is finally presented, making use of operators representing the manipulations occurred with the surfaces taking part in the generation of the interferograms. The potential advantages of the new interferogram processing technique are pointed out. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).
Journal/Review: OPTICAL ENGINEERING
Volume: 51 (8) Pages from: 081510 to: 081510
KeyWords: Generalized iterative approaches; Interferogram processing; Interferograms; Interferometric data; Iterative algorithm; Multiple measurements; Planarity; Synthetic data, Algorithms; Iterative methods, InterferometryDOI: 10.1117/1.OE.51.8.081510Citations: 14data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2019-09-15References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here