Scientific Results

Resolution limitation in EBL optical grating fabrication on InGaAsP/InP substrate

Year: 1990

Authors: GENTILI M., GRELLA L., LUCCHESINI A., MENEGHINI G., SCOPA L.

Autors Affiliation: IESS – CNR Roma;
CSELT, Torino.

Journal/Review:

More Information: ISSN: 0393-2648
KeyWords: Electron beam lithography; InGaAsP; Laser diode; Monte Carlo simulation; Electron scattering

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