Scientific Results

Digital holography: a non-destructive technique for inspection of MEMS

Year: 2009

Authors: Coppola G., Grilli S., Ferraro P., De Nicola S., Finizio A.

Autors Affiliation: CNR – Istituto di Microelettronica e Microsistemi, Via P. Castellino 111 Napoli, Italy, CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli, Italy; CNR – Istituto di Cibernetica,Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy

Journal/Review:

More Information: isbn 109812834125
KeyWords: digital holography

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