Interferometric characterization of mono and polycrystalline CVD diamond

Year: 2009

Authors: Vannoni M., Molesini G., Sciortino S., Lagomarsino S., Olivero P.

Autors Affiliation: CNR-Istituto Nazionale di Ottica Applicata, Florence, Italy; Department of Energetic, University of Florence, Florence, Italy; Department of Experimental Physics, University of Turin, Turin, Italy

Abstract: Mono and polycrystalline Chemical Vapor Deposited (CVD) diamond is a promising material for several advanced topics: microchips substrate, biological applications, UV and particle detection. Commercial CVD diamonds are available in small square size, commonly 3-5 millimeters side and 0.5-1.5 millimeters thickness. To improve diamond reliability for described applications, it is important to have a quality control on diamond samples, not only for electrical constants but also for optical characteristics and surface roughness. In this paper we present an optical characterization method based on interferometric instruments, to measure surface structure and internal homogeneity of mono ad polycrystalline commercial CVD diamonds, with measurement examples.

Conference title:

KeyWords: Biological applications; Chemical vapor deposited diamond; CVD Diamond; Diamond samples; Interferometric instruments; Optical characteristics; Optical characterization; Particle detection; Polycrystalline; Polycrystalline CVD diamond; Promising materials; UV- and, Biological materials; Diamonds; Interferometers; Interferometry; Optical data processing; Optical testing; Optical variables measurement; Quality function deployment; Surface roughness; Surface structure; Total quality management; Chemical vapor deposition
DOI: 10.1117/12.827535

Citations: 3
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