Scientific Results

MEMS characterization by digital holography

Year: 2005

Authors: Coppola G., Striano V., Ferraro P., Grilli S., Alfieri D., De Nicola S., Finizio A., Pierattini G., Javidi B.

Autors Affiliation: CNR-IMM, CNR-INOA, CNR-ICIB, University of Connecticut


KeyWords: MEMS; digital holography;

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