Three-channel homodyne interferometer
Authors: Greco V., Iemmi C., Ledesma S., Molesini G., Quercioli F., Varasi M.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
ALENIA, Rome 00131, Italy
Abstract: A three-channel homodyne interferometer based on a structured delay plate is described. Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.
Volume: 5 (5) Pages from: 15 to: 16
KeyWords: multiphase homodyne interferometry; structured delay plate; optical metrology