Three-channel homodyne interferometer

Year: 1994

Authors: Greco V., Iemmi C., Ledesma S., Molesini G., Quercioli F., Varasi M.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
ALENIA, Rome 00131, Italy

Abstract: A three-channel homodyne interferometer based on a structured delay plate is described. Detection and data acquisition are performed with standard optoelectronics in a PC environment. The device, which is used as a displacement sensor, features sub-nanometric sensitivity.


Volume: 5 (5)      Pages from: 15  to: 16

KeyWords: multiphase homodyne interferometry; structured delay plate; optical metrology