Optical Micro-profilometry for Roughness Measurement

Year: 2007

Authors: Fontana R., Daffara C., Gambino M.C., Pampaloni E., Pezzati L.

Autors Affiliation: INOA-CNR Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS

KeyWords: Optical Microprofilometry; Roughness Measurement;