Scientific Results

Three-flat test with plates in horizontal posture

Year: 2008

Authors: Vannoni M., Molesini G.

Autors Affiliation: CNR- Istituto nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: Measuring flats in the horizontal posture with interferometers is analyzed in detail, taking into account the sag produced by gravity. A mathematical expression of the bending is provided for a plate supported at three unevenly spaced locations along the edge. It is shown that the azimuthal terms of the deformation can be recovered from a three-flat measuring procedure, while the pure radial terms can only be estimated. The effectiveness of the iterative algorithm for data processing is also demonstrated. Experimental comparison on a set of three flats in horizontal and upright posture is provided. (C) 2008 Optical Society of America.

Journal/Review: APPLIED OPTICS (2004)

Volume: 47 (12)      Pages from: 2133  to: 2145

KeyWords: optical testing; absolute planarity; optical metrology
DOI: 10.1364/AO.47.002133

Citations: 23
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