Three-flat test with plates in horizontal posture
Authors: Vannoni M., Molesini G.
Autors Affiliation: CNR- Istituto nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: Measuring flats in the horizontal posture with interferometers is analyzed in detail, taking into account the sag produced by gravity. A mathematical expression of the bending is provided for a plate supported at three unevenly spaced locations along the edge. It is shown that the azimuthal terms of the deformation can be recovered from a three-flat measuring procedure, while the pure radial terms can only be estimated. The effectiveness of the iterative algorithm for data processing is also demonstrated. Experimental comparison on a set of three flats in horizontal and upright posture is provided. (C) 2008 Optical Society of America.
Journal/Review: APPLIED OPTICS (2004)
Volume: 47 (12) Pages from: 2133 to: 2145
KeyWords: optical testing; absolute planarity; optical metrologyDOI: 10.1364/AO.47.002133Citations: 23data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2019-10-13References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here