Scientific Results

Surface topography of microstructures in lithium niobate by digital holographic microscopy

Year: 2004

Authors: De Nicola S., Ferraro P., Finizio A., Grilli S., Coppola G., Iodice M., De Natale P., Chiarini M.

Autors Affiliation: Istituto di Cibernetica del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; Istituto Nazionale di Ottica Applicata, Sez. di Napoli, c/o Istituto di Cibernetica del CNR\” E. Caianiello\”, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Napoli, Via P. Castellino 111, 80131, Napoli, Italy; Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy; Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Bologna, Via P. Godetti 101, 40129, Bologna, Italy

Abstract: We report here on the application of digital holographic microscopy as a metrological tool for the inspection and the micro-topography reconstruction of different microstructures fabricated in bulk lithium niobate by differential etching of reversed ferroelectric domain patterned crystals. These structures have a range of applications in optical ridge waveguides, alignment structures, V-grooves, micro-tips and micro-cantilever beams and precise control of the surface quality and topography is required. The technique allows us to obtain digitally a high-fidelity surface topography description of the specimen with only one image acquisition allowing us to have relatively simple and compact set-ups able to give quantitative information on object morphology. The advantages of this technique compared to traditional microscopy are discussed.

Journal/Review: MEASUREMENT SCIENCE & TECHNOLOGY

Volume: 15 (5)      Pages from: 961  to: 968

KeyWords: Cantilever beams; Crystals; Etching; Ferroelectric materials; Holography; Image processing; Lithium compounds; Microstructure; Waveguides, Image acquisition; Object morphology; Precise control; Surface quality, Measurement theory, measurement method; Microstructure; Topography
DOI: 10.1088/0957-0233/15/5/026

Citations: 27
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