Investigation on reversed domain structures in lithium niobate crystals patterned by interference lithography
Authors: Grilli S., Ferraro P., De Nicola S., Finizio A., Pierattini G., De Natale P., Chiarini M.
Autors Affiliation: Istituto Nazionale di Ottica Applicata, Sez. di Napoli, c/o Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Napoli, Via Pietro Castellino 111, 80131, Napoli, Italy;
Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy;
Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Sez. di Bologna, Via P. Gobetti 101, 40129 Bologna, Italy
Abstract: We demonstrate fabrication of periodically poled lithium niobate samples by electric field poling, after patterning by interference lithography. Furthermore we investigate the poling process at an overpoling regime which caused the appearance of submicron dot domains very similar to those induced by backswitch but different in nature. We show the possibility for realizing submicron-scaled three-dimensional domain patterns that could be applied to the construction of photonic crystals and in nonlinear optics. We show that high etch-rate applied to such structures allows to obtain pyramidal-like submicron relief structures which in principle could find application for waveguide construction in photonic bandgap devices. (C) 2003 Optical Society of America.
Journal/Review: OPTICS EXPRESS
Volume: 11 (4) Pages from: 392 to: 405
KeyWords: Coatings; Crystals; Electric field effects; Electrooptical materials; Etching; Ferroelectric materials; Interferometers; Light interference; Lithography; Morphology; Photoresists; Spin coating; Waveguides, Electric field poling; High voltage probe (HVP); Photonic bandgap devices; Photonic crystals, Lithium niobateDOI: 10.1364/OE.11.000392Citations: 52data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2020-11-22References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here