Scientific Results

Controlling images parameters in DH reconstruction and its application for MEMS inspection

Year: 2004

Authors: Coppola G., Ferraro P., De Nicola S., Alfieri D., Finizio A., Pierattini G.

Autors Affiliation: Istituto per la Microelettronica e i Microsistemi – CNR, Via Pietro Castellino 111, 80131, Napoli, Italy;
Istituto Nazionale di Ottica Applicata, Sez. di Napoli,, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto di Cibernetica “E. Caianiello” – CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy


KeyWords: Micro-Electro-Mechanical Systems

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