Scientific Results

Absolute planarity with three-flat test: an iterative approach with Zernike polynomials

Year: 2008

Authors: Vannoni M., Molesini G.

Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided. (c) 2008 Optical Society of America.

Journal/Review: OPTICS EXPRESS

Volume: 16 (1)      Pages from: 340  to: 354

KeyWords: Algorithms; Iterative methods; Numerical methods, Planarity; Zernike polynomial; Polynomials; algorithm; article; computer simulation; interferometry; mathematical computing; methodology; theoretical model, Algorithms; Computer Simulation; Interferometry; Models; Theoretical; Numerical Analysis Computer-Assisted
DOI: 10.1364/OE.16.000340

Citations: 27
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