Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method

Year: 2005

Authors: de Angelis M., De Nicola S., Ferraro P., Finizio A., Grilli S., Pierattini G.

Autors Affiliation: Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto Nazionale di Ottica Applicata, Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy

Abstract: Phase shifting interferometry is a preferred technique for high-resolution phase profile measurement, but the difficulty in generating the requested shifted pattern has limited the use of the technique to low-noise environment and in case accurate calibration of the phase shifting device is available. In the present experiment, a sample having one-dimensional straight phase boundary is mounted in one arm of an interferometer. One single image of the fringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of the sample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern. (c) 2005 Elsevier Ltd. All rights reserved.

Journal/Review: OPTICS AND LASERS IN ENGINEERING

Volume: 43 (12)      Pages from: 1305  to: 1314

KeyWords: optical measurement; image processing;
DOI: 10.1016/j.optlaseng.2005.01.003

Citations: 8
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