Confocal microscopy for the testing of integrated optical devices

Year: 2003

Authors: Quercioli F., Tiribilli B., Vassalli M., Ghirelli A., Righini G.C., Pelli S., Cremona M.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Lab. di Biofotonica, Largoo E. Fermi 6, 50125 Firenze, Italy;
Nello Carrara Institute of Applied Physics, IFAC-CNR, via Panciatichi 64, Firenze Italy;
Departamento de FIsica, Pontificia Universidade Católica do Rio de Janeiro, PUC-Rio, Brazil

Abstract: Planar waveguides have been realized in lithium fluoride crystals by ion-beam irradiation. Ion bombardment produces color centers in the LiF crystal, increasing locally the refractive index. Confocal microscopy is applied to the characterization of the waveguides in order to assess the uniformity and distribution of color centers through the measurement of the photoluminescence emission.

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KeyWords: Confocal multiphoton microscope; Ion beam irradiation; Waveguide realization, Actuators; Ion beams; Ion bombardment; Irradiation; Photoluminescence; Refractive index; Spontaneous emission; Optical devices
DOI: 10.1117/12.527040

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