A new apparatus for electron tomography in the Scanning Electron Microscope
Authors: Morandi V., Del Marro M., Maccagnani P., Masini L., Migliori A., Ortolani L., Pallocca G., Pezza A., Rossi M., Sberveglieri G., Vittori-Antisari M., Vinciguerra P., Ferroni M.
Autors Affiliation: CNR IMM Sez Bologna, I-40129 Bologna, Italy; ASSING SPA, I-00016 Rome, Italy; Univ Roma La Sapienza, Dipto Sci Base & Appl Ingn, I-00161 Rome, Italy; Univ Roma La Sapienza, Ctr Ric Nanotecnol Appl Ingn CNIS, I-00161 Rome, Italy; Univ Brescia, Dip Ingn Informaz, SENSOR Lab, I-25123 Brescia, Italy; CNR INO, I-25123 Brescia, Italy; ENEA Ctr Ric Casaccia, Unita Tecn Tecnol Mat, I-00123 Rome, Italy
Abstract: The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.
KeyWords: Scanning Electron Microscope.