Liquid mirror as planarity standard: a simplified experimental approach

Year: 2005

Authors: Vannoni M., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A simplified version of the liquid mirror setup to serve as planarity reference standard is described in detail. Particulars of the mounting, maintenance and use of the mirror are provided. A series of measurements over a diameter of 90 mm is reported; the resulting expanded uncertainty for the peak-to-valley achieved in experiments is 7 nm (2s).

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KeyWords: Maintenance; Mountings; Uncertain systems; Reference standard; Uncertainty; Mirrors; Optical testing; Planatity standard; Optical metrology
DOI: 10.1117/12.612245

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