Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation

Year: 2016

Authors: Garcia G., Preda I., Diaz-Hijar M., Tornio-Marquez V., Pena-Rodriguez O., Olivares J., Bosia F., Pugno NM., Picollo F., Giuntini L., Sordini A., Olivero P., Lopez-Mir L., Ocal C.

Autors Affiliation: ALBA Synchrotron Light Source CELLS ALBA, Barcelona 08290, Spain;‎ CSIC, Inst Opt, C Serrano 121, E-28006 Madrid, Spain;‎ Univ Autonoma Madrid, Ctr Microanal Mat CMAM, E-28049 Madrid, Spain;‎ UPM, Inst Fus Nucl, C Jose Gutierrez Abascal 2, E-28006 Madrid, Spain;‎ Univ Turin, Dept Phys, Nanostruct Interfaces & Surfaces NIS Interdept Ct, Turin, Italy; Natl Inst Nucl Phys, Sect Torino, Ist Nazl Fis Nucl, Turin, Italy; Univ Trento, Dept Civil Environm & Mech Engn, Lab Bioinspired & Graphene Nanomech, Trento, Italy;‎ Bruno Kessler Fdn, Ctr Mat & Microsyst, Trento, Italy;‎ Queen Mary Univ, Sch Engn & Mat Sci, London, England;‎ Ist Nazl Fis Nucl, Sez Firenze, Sesto Fiorentino, Italy; Natl Inst Opt INO CNR, Florence, Italy;‎ Inst Ciencia Mat Barcelona ICMAB CSIC, Campus UAB, Barcelona 08193, Spain;‎ MAX IV Lab, Fotongatan 2, S-22594 Lund, Sweden

Abstract: This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the samplesurface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely differentrange of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10-40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling Measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks. (C) 2016 Elsevier B.V. All rights reserved.


Volume: 69      Pages from: 1  to: 7

KeyWords: Irradiation; Damage; Swelling; Nanostructuring; Ion
DOI: 10.1016/j.diamond.2016.06.015

Citations: 7
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