An optical probe based on spherical aberration for surface figure testing
Year: 1989
Authors: Quercioli F., Trivi M., Molesini G., Melozzi M.
Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
Officine Galileo, Campi Bisenzio
Abstract: An optical distance sensor is presented that utilizes longitudinal spherical aberration to probe and monitor the height distribution of a reflective sample. The surface shape parameters are recovered after scanning. The working principle is discussed in terms of optical design data, and the actual performance of a laboratory setup is demonstrated accordingly.
Journal/Review: OPTICS COMMUNICATIONS (PRINT)
Volume: 71 (1-2) Pages from: 11 to: 14
KeyWords: Laser Beams–Applications; Sensors; Surfaces–Contour Measurement, Optical Distance Sensors; Spherical Aberration; Surface Figure Testing; Optical Devices; Optical probe; Optical profilometry