Scientific Results

Iterative algorithm for three flat test

Year: 2007

Authors: Vannoni M., Molesini G.

Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated. (C) 2006 Optical Society of America.

Journal/Review: OPTICS EXPRESS

Volume: 15 (11)      Pages from: 6809  to: 6816

KeyWords: Instrumentation, measurement, metrology; Interferometry; Metrology; Optical standards and testing; Surface measurements, figure
DOI: 10.1364/OE.15.006809

Citations: 36
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