Iterative algorithm for three flat test
Authors: Vannoni M., Molesini G.
Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated. (C) 2006 Optical Society of America.
Journal/Review: OPTICS EXPRESS
Volume: 15 (11) Pages from: 6809 to: 6816
KeyWords: Instrumentation, measurement, metrology; Interferometry; Metrology; Optical standards and testing; Surface measurements, figureDOI: 10.1364/OE.15.006809Citations: 36data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2020-05-31References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here