Fabrication of sub-micron period surface structures in LiNbO3
Authors: Grilli S., Ferraro P., Sansone L., Paturzo M., De Natale P.
Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy
Abstract: Sub-micron period reversed domain patterns are fabricated in congruent LiNbO3 by using electric field overpoling. Slight wet etching of the domain engineered samples in HF solution generates surface relief structures faithfully reproducing the resist pattern geometries generatedby holographic lithography. Moire holographic lithography is also used tojabricate more complicated resist templates to be transferred onto the LiNbO3 substrates as surface structures. A wide variety ofstructures is presented and discussed. The preliminary results show the possibility to use the fabricated structures for the realization qfphotonic crystal devices such as Bragg gratings, micro-ring resonators, etc. for telecom applications.
Volume: 352 Pages from: 320 to: 325
KeyWords: lithium niobateDOI: 10.1080/0015190701358142Citations: 1data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2020-05-31References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here