Scientific Results

Fabrication of sub-micron period surface structures in LiNbO3

Year: 2007

Authors: Grilli S., Ferraro P., Sansone L., Paturzo M., De Natale P.

Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy

Abstract: Sub-micron period reversed domain patterns are fabricated in congruent LiNbO3 by using electric field overpoling. Slight wet etching of the domain engineered samples in HF solution generates surface relief structures faithfully reproducing the resist pattern geometries generatedby holographic lithography. Moire holographic lithography is also used tojabricate more complicated resist templates to be transferred onto the LiNbO3 substrates as surface structures. A wide variety ofstructures is presented and discussed. The preliminary results show the possibility to use the fabricated structures for the realization qfphotonic crystal devices such as Bragg gratings, micro-ring resonators, etc. for telecom applications.

Journal/Review:

Volume: 352      Pages from: 320  to: 325

KeyWords: lithium niobate
DOI: 10.1080/0015190701358142

Citations: 1
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English