BackAuthor: Lucchesini Alessandro Category: Papers Journals 1) Resolution limitation in EBL optical grating fabrication on InGaAsP/InP substrate By: Gentili M., Gella L., Lucchesini A., Meneghini G.(*), Scopa L. Year: 1990 (Cit.: 0)
2) Micron and submicron electron beam lithography by the monoresist technique. By: Gentili M., Petrocco G., Lucchesini A., Chiesa W.(1), Ronzoni F.(1), D’Amico A.(2) Year: 1987 (Cit.: 0)