Joint interferometric measurement of planarity and parallelism

Year: 2004

Authors: Vannoni M., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: An interferometric method to simultaneously test plane parallel plates both for planarity and parallelism of end faces is reported. Measurements are taken by insertion of the plates in a reference cavity. The optical configuration uses a standard programmable interferometer, with an external right-angle prism folding back the probe beam. The prism error is determined by cavity calibration, and is subtracted at data reduction. The measuring procedure is discussed in detail, and results of a laboratory demonstration are presented. (C) 2004 Society of Photo-Optical Instrumentation Engineers.

Journal/Review: OPTICAL ENGINEERING

Volume: 43 (5)      Pages from: 1215  to: 1220

KeyWords: Calibration; Cameras; Charge coupled devices; Data reduction; Interferometers; Laser beams; Micrometers; Optical testing; Prisms; Refractive index, Cavity calibration; Joint interferometric measurement; Plane parallel plates; Probe beam; Programmable interferometer; Interferometry
DOI: 10.1117/1.1689334

Citations: 9
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