Tailoring the textured surface of porous nanostructured NiO thin films for the detection of pollutant gases

Year: 2015

Authors: Kumar R., Baratto C., Faglia G., Sberveglieri G., Bontempi E., Borgese L.

Autors Affiliation: CNR INO, SENSOR Lab, I-25133 Brescia, Italy; Univ Brescia, Dept Informat Engn, I-25133 Brescia, Italy; Univ Brescia, INSTM, Dept Mech & Ind Engn, I-25133 Brescia, Italy; Univ Brescia, Chem Technol Lab, Dept Mech & Ind Engn, I-25133 Brescia, Italy.

Abstract: In the present article, an experimental approach to detect pollutant gases in presence of humidity was applied for gas sensors based on p-type NiO thin films. NiO thin films were deposited by radio frequency magnetron sputtering in inert atmosphere using a NiO target. Thin films were investigated by scanning electron microscopy to observe their surface morphology. Crystal structure and vibrational study were investigated by X-ray diffraction and micro-Raman spectroscopy, respectively. It was observed that deposition temperature played a crucial role in the structural and surface morphology of NiO thin films. Sensing response of the nanostructured thin films to reducing and oxidizing gas was studied as a function of gas concentration and operating temperature. A double digit (12.3) response was observed towards ozone at 200 degrees C, while maximum response to ethanol and acetone was recorded at 400 degrees C. A correlation was established between sensing response and crystalline dimension for ozone sensing. The result showed that NiO thin films can be used as p-type metal oxide material for the fabrication of solid state gas sensors to detect low concentrations of ozone (70 ppb). (C) 2015 Published by Elsevier B.V.

Journal/Review: THIN SOLID FILMS

Volume: 583      Pages from: 233  to: 238

More Information: The research leading to these results has received funding from the European Communities 7th Framework Programme under grant agreement NMP3-LA-2010-246334. Financial support of the European Commission is therefore gratefully acknowledged.
KeyWords: Gas sensor; Nickel oxide; p-Type semiconductor; Micro-Raman spectroscopy; Sensing response
DOI: 10.1016/j.tsf.2015.04.004

Citations: 43
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