Micro-beam and pulsed laser beam techniques for the micro-fabrication of diamond surface and bulk structures

Year: 2015

Authors: Sciortino S., Bellini M., Bosia F., Calusi S., Corsi C., Czelusniak C., Gelli N., Giuntini L., Gorelli F., Lagomarsino S., Mando P.A., Massi M., Olivero P., Parrini G., Santoro M., Sordini A., Sytchkova A., Taccetti F., Vannoni M.

Autors Affiliation: Dipartimento di Fisica e Astronomia, Università di Fisica, Via Sansone 1, 50019 Sesto Fiorentino, Firenze, Italy;
Istituto Nazionale di Fisica Nucleare (INFN), Sezione di Firenze, Via Sansone 1, 50019 Sesto Fiorentino, Firenze, Italy;
European Laboratory for Non-linear Spectroscopy, Via Nello Carrara 1, 50019 Sesto Fiorentino, Firenze, Italy; Istituto Nazionale di Ottica (INO-CNR), Largo E. fermi 6, 50125 Florence, FI, Italy; Physics Department and Nanostructured Interfaces and Surfaces Inter-departmental Centre, University of Torino, via P. Giuria 1, 10125 Torino, Italy; INFN Sez Torino, via P. Giuria 1, 10125 Torino, Italy; Consorzio Nazionale Interuniversitario per le Scienze Fisiche della Materia (CNISM), Via della Vasca Navale 84, 00146 Roma, Italy; ENEA Optical Coatings Group, via Anguillarese 301, 00123 Roma, Italy

Abstract: Micro-fabrication in diamond is applicable in a wide set of emerging technologies, exploiting the exceptional characteristics of diamond for application in bio-physics, photonics and radiation detection. Micro ion-beam irradiation and pulsed laser irradiation are complementary techniques, which permit the implementation of complex geometries, by modification and functionalization of surface and/or bulk material, modifying the optical, electrical and mechanical characteristics of the material. In this article we summarize the work done in Florence (Italy), concerning ion beam and pulsed laser beam micro-fabrication in diamond.(C) 2014 Elsevier B.V. All rights reserved.

Journal/Review: NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Volume: 348      Pages from: 191  to: 198

KeyWords: Detectors; Diamonds; Fabrication; Ion beams; Ions; Irradiation; Laser beams; Mechanical properties, Complementary techniques; Complex geometries; Emerging technologies; Ion beam irradiation; Ion beam modification; Laser writing; Mechanical characteristics; Radiation detection, Pulsed lasers
DOI: 10.1016/j.nimb.2014.11.061

Citations: 2
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