Controlling images parameters in the reconstruction process of digital holograms

Year: 2004

Authors: Ferraro P., Coppola G., Alfieri D., De Nicola S., Finizio A., Pierattini G.

Autors Affiliation: Consiglio Nazionale delle Ricerche (CNR) Naples, Italy

Abstract: Digital holograms recorded with a charge-coupled device array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size, and image resolution. Those explored potentialities open further the novel prospective of application of digital holography in single- and multiwavelengths operation either for display or metrological applications. We demonstrate the concept of controlling parameters in image reconstruction of digital holograms in some real situations for inspecting silicon microelectronic-mechanical systems structures.

Journal/Review: IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS

Volume: 10 (4)      Pages from: 829  to: 839

KeyWords: holographic interferometry; holography; metrology; microelectromechanical devices; microscopy
DOI: 10.1109/JSTQE.2004.833876

Citations: 19
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