Scanning probe microscopy as a tool for nanoimprint lithography

Year: 2007

Authors: Pingue P., Dinelli F., Baschieri P., Ascoli C., Menozzi C., Facci P., Beltram F.

Autors Affiliation:

Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS

KeyWords: Nanolitografia; AFM; FIB