Digital holography: a non-destructive technique for inspection of MEMS
Year: 2009
Authors: Coppola G., Grilli S., Ferraro P., De Nicola S., Finizio A.
Autors Affiliation: CNR – Istituto di Microelettronica e Microsistemi, Via P. Castellino 111 Napoli, Italy, CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli, Italy; CNR – Istituto di Cibernetica,Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy
Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS
More Information: isbn 109812834125KeyWords: digital holography