Self-patterning of a polydimethylsiloxane microlens array on functionalized substrates and characterization by digital holography

Year: 2009

Authors: Merola F., Paturzo M., Coppola S., Vespini V., Ferraro P.

Autors Affiliation: CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy; Università degli Studi di Napoli ‘Federico II’, Dipartimento di Scienze Fisiche, Via Cintia, 80126 Napoli, Italy

Abstract: Microlens arrays are realized through a self-arrangement process of thin liquid polymeric polydimethylsiloxane (PDMS) film on a functionalized polar dielectric crystal substrate. The self-arrangement process is named the pyro-electro-wetting mechanism. The substrate, a LiNbO3 (LN) z-cut wafer, has been micro-engineered with periodically poled ferroelectric domains, with the aim to provide an appropriate wettability patterning induced by a thermal stimulus. Different experimental procedures have been explored demonstrating that arrays of thousands of microlenses, having a diameter size of 100 mu m and focal lengths ranging between 300 and 1100 mu m, can be fabricated. Furthermore, a microscope interference method based on digital holography is adopted for microlens characterization.

Journal/Review: JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Volume: 19 (12)      Pages from: 125006-1  to: 125006-5

KeyWords: polymeric microlenses; lithium niobate; digital holography; pyro-electro-wetting;
DOI: 10.1088/0960-1317/19/12/125006

Citations: 28
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