A fast optical profilometer

Year: 1983

Authors: Bertani D., Cetica M., Ciliberto S.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A simple optical profilometer is described for the measurement of surface profiles. The device is based on the use of a photodiode array that allows a fast examination of the surface and a high sensitivity. It also overcomes the randomness requirements which limit the use of optical devices working on angular diagram or speckle correlation measurements. Preliminary measurements of workpieces profiles are shown.

Journal/Review: OPTICS COMMUNICATIONS

Volume: 46 (1)      Pages from: 1  to: 3

KeyWords: optical profilometer
DOI: 10.1016/0030-4018(83)90018-4

Citations: 7
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