Monitoring the optical thickness of transparency films by homodyne interferometry
Year: 1996
Authors: Greco V., Trivi M., Molesini G.
Autors Affiliation: Istituto Nazionale di Ottica, Largo e. Fermi 6, 50125 Firenze, Italy
Conference title: Applied Optics and Opto-Electronics 1996
Place: Reading
KeyWords: Homodyne interferometry; optical metrology;