Absolute calibration of optical flats: long term reproducibility of interferometric measurements
Year: 2001
Authors: Greco V., Molesini G.
Autors Affiliation: Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy
Conference title: 2nd International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Place: Turin
KeyWords: Metrology; optical testing; planarity