Profile measurement of a one-dimensional phase boundary sample using a single shot phase-step method

Year: 2005

Authors: de Angelis M., De Nicola S., Ferraro P., Finizio A., Grilli S., Pierattini G.

Autors Affiliation: Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto Nazionale di Ottica Applicata, Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy

Abstract: Phase shifting interferometry is a preferred technique for high-resolution phase profile measurement, but the difficulty in generating the requested shifted pattern has limited the use of the technique to low-noise environment and in case accurate calibration of the phase shifting device is available. In the present experiment, a sample having one-dimensional straight phase boundary is mounted in one arm of an interferometer. One single image of the fringe pattern is recorded, a simple image process is applied generating phase shifted patterns from the original image. Using the appropriate phase shift algorithms, a phase map of the sample is obtained which gives a quantitative measurement of the topographical structure with the resolution of the phase shift method but a single shot recorded pattern. (c) 2005 Elsevier Ltd. All rights reserved.

Journal/Review: OPTICS AND LASERS IN ENGINEERING

Volume: 43 (12)      Pages from: 1305  to: 1314

More Information: This research was partially funded by the Ministero dell’Istruzione dell’Università e della Ricerca (MIUR) within the Fondo per gli Investimenti della Ricerca di Base project “Microdispositivi in Niobato di Litio” n. RBNE01KZ94, and partially by the project MIUR “Circuiti fotonici integrati per le telecomunicazioni ottiche e la sensoristica” n.77 DD N.1105/2002.
KeyWords: optical measurement; profile measurement; image processing; phase step method
DOI: 10.1016/j.optlaseng.2005.01.003

Citations: 8
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