Photonic bands in patterned silicon-on-insulator waveguides

Year: 2002

Authors: Patrini M., Galli M., Marabelli F., Agio M., Andreani L.C., Peyrade D., Chen Y.

Autors Affiliation: INFM, I-27100 Pavia, Italy; Univ Pavia, Dipartimento Fis A Volta, I-27100 Pavia, Italy; CNRS, LPN, F-91460 Marcoussis, France.

Abstract: One- and two-dimensional photonic crystals are obtained by electron beam lithography and reactive ion etching on silicon-on-insulator waveguides. Variable-angle reflectance is measured and calculated in the 0.2-2-eV energy range, giving evidence of the quasi-guided modes of the photonic structure. Photonic bands in the one-dimensional case are determined and compare very well to those calculated with an expansion on the basis of the waveguide modes.

Journal/Review: IEEE JOURNAL OF QUANTUM ELECTRONICS

Volume: 38 (7)      Pages from: PII S 0018-9197  to: PII S 0018-9197

KeyWords: modeling; optical materials; reflectometry; waveguides
DOI: 10.1109/JQE.2002.1017602

Citations: 30
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