Recent advancements in digital holographic microscopy and its applications

Year: 2004

Authors: Ferraro P., Coppola G., Alfieri D., De Nicola S., Finizio A., Pierattini G.

Autors Affiliation: Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (Na), Italy;
Istituto di Cibernetica “E. Caianiello” del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (Na), Italy;
Istituto per la Microelettronica e Microsistemi del CNR, Via P. Castellino, 111 80134 Napoli, Italy

Abstract: Digital holograms recorded with a charge coupled device camera array are numerically reconstructed in amplitude and phase through calculation of the Fresnel-Kirchhoff integral. The flexibility offered by the reconstruction process in digital holography allows exploitation of new possibilities of application in microscopy. Through the reconstruction process we will show that it is possible to control image parameters as focus distance, image size and image resolution. We report on recent developments obtained in the numerical reconstruction process of holograms. Novel prospective of application of digital holography in single and multi-wavelengths operation either for display and metrological applications can be explored by those recent achievements. Examples of applications of digital holographic microscopy for characterizing silicon MEMS structures by adopting new procedures are illustrated and discussed.

Journal/Review: PROCEEDINGS OF SPIE

Volume: 5457      Pages from: 481  to: 491

KeyWords: Digital holography; holographic interferometry; metrology; microelectromechanical devices; microscopy
DOI: 10.1117/12.554755

Citations: 4
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