Silicon-nitride nanosensors toward room temperature quantum optomechanics

Year: 2021

Authors: Serra E., Borrielli A., Marin F., Marino F., Malossi N., Morana B., Piergentili P., Prodi G.A., Sarro P.M., Vezio P., Vitali D., Bonaldi M.

Autors Affiliation: Fdn Bruno Kessler, Trento Unit, CNR, Inst Mat Elect & Magnetism,IMEM, Via Cascata 56-C, IT-38123 Trento, Italy; Trento Inst Fundamental Phys & Applicat, Ist Nazl Fis Nucl INFN, Via Sommarive 14, IT-38123 Trento, Italy; Delft Univ Technol, Dept Microelect, Feldmannweg 17, NL-2628 CT Delft, Netherlands; Univ Firenze, Dipartimento Fis & Astron, Via Sansone 1, I-50019 Sesto Fiorentino, FI, Italy; European Lab Nonlinear Spect LENS, Via Carrara 1, I-50019 Sesto Fiorentino, FI, Italy; CNR, INO, Lgo Enrico Fermi 6, I-50125 Florence, Italy; Ist Nazl Fis Nucl, Sez Firenze, Via Sansone 1, I-50019 Sesto Fiorentino, FI, Italy; Univ Camerino, Sch Sci & Technol, Phys Div, Via Madonna delle Carceri 9, I-62032 Camerino, MC, Italy; Ist Nazl Fis Nucl, Sez Perugia, Via A Pascoli, I-06123 Perugia, Italy; Univ Trento, Dipartimento Matemat, I-38123 Trento, Italy.

Abstract: Micro- and nanomechanical resonators play a prominent part in many sensing and signal processing platforms due to their capability to pervasively couple with a wide variety of physical systems. Particularly relevant is their embedding in advanced optomechanical setups, which has recently pioneered optically cooled mechanical oscillators toward the quantum regime. A frequently adopted experimental scheme exploits a thin, highly tensioned Si3N4 nanomembrane where the membrane?s vibrations are dispersively coupled to the optical mode of a Fabry-Perot cavity. A significant effort has been done into realizing high-quality factor membranes, considering that low mechanical loss represents a benchmark to operate in the elusive quantum regime. In this article, we compare two state-of-the-art SiN resonators, realized exploiting the dilution of the material?s intrinsic dissipation and efficient solutions to fully isolate the membrane from the substrate. In particular, we examine and discuss the interplay between the edge and distributed dissipation and propose an analytical approach to evaluate the total intrinsic loss. Also, our analysis delves into the sensitivity of the devices to a point-like force and a uniformdensity force field. These results provide meaningful guidelines for designing new ultra-coherent resonating devices. Published under an exclusive license by AIP Publishing.

Journal/Review: JOURNAL OF APPLIED PHYSICS

Volume: 130 (6)      Pages from: 064503-1  to: 064503-17

More Information: Research was performed within the Project QuaSeRT funded by the QuantERA ERA-NET Cofund in Quantum Technologies implemented within the European Union´s Horizon 2020 Programme. The research has been partially supported by INFN (HUMOR project).
KeyWords: optomechanics, membrane resonator
DOI: 10.1063/5.0055954

Citations: 9
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