An integrated approach for photonic crystal inspection and characterization

Year: 2006

Authors: Tiribilli B., Ferraro P., Grilli S., Molesini G., Vannoni M., Vassalli M.

Autors Affiliation: Istituto Sistemi Complessi, CNR, via Madonna del Piano 10, 50019, Sesto Fno (FI), Italy; Istituto Nazionale di Ottica Applicata, CNR, Via Campi Flegrei 34, 80078 – Pozzuoli, (NA), Italy; Istituto Nazionale di Ottica Applicata, CNR, L.go Fermi 6, 50125 Firenze, Italy

Abstract: Photonic crystals are attractive optical materials for controlling and manipulating light. They are of great interest for both fundamental and applied research, and they are expected to find commercial applications soon. In this work digital holography, white light interferometry and atomic force microscopy have been applied to the inspection and characterization of 1D and 2D nanofabricated LiN photonic crystals. Periodic patterns with periods ranging form several microns to a fraction of micron have been accurately analysed. Optical methods allow to explore relatively large areas while atomic force microscopy is well suited for high-resolution inspection of the small features.

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KeyWords: Atomic Force Microscopy; Holography; Light; Light interference; Optical materials; Optical testing; Photons; Digital holography; Optical methods; Photonic crystals; White light interferometry; Molecular crystals
DOI: 10.1117/12.664930

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