Micro and nano-patterning of single-crystal diamond by swift heavy ion irradiation

Year: 2016

Authors: Garcia G., Preda I., Diaz-Hijar M., Tornio-Marquez V., Pena-Rodriguez O., Olivares J., Bosia F., Pugno NM., Picollo F., Giuntini L., Sordini A., Olivero P., Lopez-Mir L., Ocal C.

Autors Affiliation: ALBA Synchrotron Light Source CELLS ALBA, Barcelona 08290, Spain; CSIC, Inst Opt, C Serrano 121, E-28006 Madrid, Spain; Univ Autonoma Madrid, Ctr Microanal Mat CMAM, E-28049 Madrid, Spain; UPM, Inst Fus Nucl, C Jose Gutierrez Abascal 2, E-28006 Madrid, Spain; Univ Turin, Dept Phys, Nanostruct Interfaces & Surfaces NIS Interdept Ct, Turin, Italy; Natl Inst Nucl Phys, Sect Torino, Ist Nazl Fis Nucl, Turin, Italy; Univ Trento, Dept Civil Environm & Mech Engn, Lab Bioinspired & Graphene Nanomech, Trento, Italy; Bruno Kessler Fdn, Ctr Mat & Microsyst, Trento, Italy; Queen Mary Univ, Sch Engn & Mat Sci, London, England; Ist Nazl Fis Nucl, Sez Firenze, Sesto Fiorentino, Italy; Natl Inst Opt INO CNR, Florence, Italy; Inst Ciencia Mat Barcelona ICMAB CSIC, Campus UAB, Barcelona 08193, Spain; MAX IV Lab, Fotongatan 2, S-22594 Lund, Sweden.

Abstract: This paper presents experimental data and analysis of the structural damage caused by swift-heavy ion irradiation of single-crystal diamond. The patterned buried structural damage is shown to generate, via swelling, a mirror-pattern on the samplesurface, which remains largely damage-free. While extensive results are available for light ion implantations, this effect is reported here for the first time in the heavy ion regime, where a completely differentrange of input parameters (in terms of ion species, energy, stopping power, etc.) is available for customized irradiation. The chosen ion species are Au and Br, in the energy range 10-40 MeV. The observed patterns, as characterized by profilometry and atomic force microscopy, are reported in a series of model experiments, which show swelling patterns ranging from a few nm to above 200 nm. Moreover, a systematic phenomenological modeling is presented, in which surface swelling Measurements are correlated to buried crystal damage. A comparison is made with data for light ion implantations, showing good compatibility with the proposed models. The modeling presented in this work can be useful for the design and realization of micropatterned surfaces in single crystal diamond, allowing generating highly customized structures by combining appropriately chosen irradiation parameters and masks. (C) 2016 Elsevier B.V. All rights reserved.

Journal/Review: DIAMOND AND RELATED MATERIALS

Volume: 69      Pages from: 1  to: 7

More Information: GG acknowledges support from the ALBA synchrotron, W. Schildkamp for inspiring discussions on the behaviour of diamond and J. Ferrer for his help in experiment preparation.; GG, MD-H, VT-M, OP-R and JO acknowledge the projects MAT-2011-28379-C03-02 of the Spanish Ministry of Economy and Competitiveness, TECHNOFUSION(II)CM (S2013/MAE2745) of the Community of Madrid, and Moncloa Campus of International Excellence (UCM-UPM) foundation for offering a PICATA postdoctoral fellowship (OP-R).; FP is supported by the DiNaMo project no. 157660 funded by National Institute of Nuclear Physics. PO is supported by the FIRB Futuro in Ricerca 2010 project (CUP code: D11J11000450001) funded by MIUR and by the A.Di.N-Tech. project (CUP code: D15E13000130003) funded by the University of Torino and Compagnia di San Paolo. The MeV ion beam implantations performed at the INFN Legnaro National Laboratories was supported by the Dia.Fab. experiment, and those at the INFN LABEC Laboratory by the FARE and CICAS experiments.; NMP is supported by the European Research Council (ERC StG Ideas 2011 BIHSNAM no. 279985, ERC PoC 2013-2 KNOTOUGH no. 632277 and ERC PoC 2015 SILKENE no. 693670), by the European Commission under the Graphene Flagship (Nanocomposites, no. 604391). FB acknowledges support from BIHSNAM.; LL-M and CO acknowledge the Spanish MINECO through the Severo Ochoa Program (SEV-2015-0496) and MAT2013-47869-C4-1-P.
KeyWords: Irradiation; Damage; Swelling; Nanostructuring; Ion
DOI: 10.1016/j.diamond.2016.06.015

Citations: 8
data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-11-17
References taken from IsiWeb of Knowledge: (subscribers only)
Connecting to view paper tab on IsiWeb: Click here
Connecting to view citations from IsiWeb: Click here