Imaging and mechanism analysis of high quality drilling by a copper vapor laser
Year: 1994
Authors: Pini R., Salimbeni R., Vannini M., Toci G.
Autors Affiliation: Istituto di Elettronica Quantistica, del CNR, Florence, Italy
Abstract: In this paper, it was demonstrated for the first time the feasibility of high quality drilling in optical materials by CVL, taking advantage of its high beam quality and high repetition rate. Observation indicated that CVL drilling in optical substrated and crystals is typically initiated by a surface optical breakdown which becomes deeper with an almost constant penetration speed along with laser irradiation. It was also indicated that direct imaging of CVL drilling in optical substrates improves the quality of laser micromachining that can find useful in similar material processing techniques.
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KeyWords: Cameras; Charge coupled devices; Copper; Drilling; Fluorescence; Gas lasers; Mechanisms; Microscopes; Optical instrument lenses; Optical materials; Optical resolving power; Substrates, Copper vapour lasers; High beam quality; High repetition rate; Micro machining techniques; Optical losses; Surface optical breakdown; Time resolved spectroscopy; Waveguide effect, Image analysisDOI: 10000000000