Characterization of microelectromechanical systems by digital holography method

Year: 2006

Authors: Baltiysky S., Gurov I., De Nicola S., Ferraro P., Finizio A., Coppola G.

Autors Affiliation: Saint Petersburg State University of Information Technologies, Mechanics and Optics 14 Sablinskaya st., Saint Petersburg, 197101, Russia;
Istituto di Cibernetica del CNR “E. Caianiello”, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
CNR – Istituto Nazionale di Ottica Applicata, Sez. di Napoli, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto per la Microelettronica e i Microsistemi del CNR, Via P. Castellino 11, 80131, Napoli, Italy

Abstract: The principle of the digital holography (DH) technique and the potentialities of the method are considered. Experimental results obtained using the DH microscopy technique for characterizing microelectromechanical systems (MEMS) are presented and discussed.

Journal/Review: IMAGING SCIENCE JOURNAL

Volume: 54 (2)      Pages from: 103  to: 110

KeyWords: digital holography; phase recovery; microelectromechanical systems
DOI: 10.1179/174313106X98746

Citations: 6
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