Three-flat test with plates in horizontal posture
Anno: 2008
Autori: Vannoni M., Molesini G.
Affiliazione autori: CNR- Istituto nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: Measuring flats in the horizontal posture with interferometers is analyzed in detail, taking into account the sag produced by gravity. A mathematical expression of the bending is provided for a plate supported at three unevenly spaced locations along the edge. It is shown that the azimuthal terms of the deformation can be recovered from a three-flat measuring procedure, while the pure radial terms can only be estimated. The effectiveness of the iterative algorithm for data processing is also demonstrated. Experimental comparison on a set of three flats in horizontal and upright posture is provided. (C) 2008 Optical Society of America.
Giornale/Rivista: APPLIED OPTICS (2004)
Volume: 47 (12) Da Pagina: 2133 A: 2145
Parole chiavi: optical testing; absolute planarity; optical metrologyDOI: 10.1364/AO.47.002133Citazioni: 23dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-04-28Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui