Niobium and tungsten oxide nanowires for chemical sensor
Autori: Bertuna A., Comini E., Zappa D., Sberveglieri G.
Affiliazione autori: Univ Brescia, SENSOR Lab, Via D Valotti 9, I-25133 Brescia, Italy; CNR INO, I-25133 Brescia, Italy
Abstract: Thin films of tungsten and niobium (WNb) were the starting point for the growth of metal oxide nanowires. RF Magnetron sputtering was used to deposit a layer of 100 nm on 2 . 2 mm(2) alumina substrates. Prepared samples were thermally oxidized to obtain the growth of nanostructures whose morphology was investigated by a scanning electron microscope (SEM). Structural properties of these nanostructures were investigated by RAMAN spectroscopy. Functional characterization was carried out using a homemade test chamber. Interdigitated contacts and heating elements were deposited by DC Magnetron sputtering, and samples were bonded to TO packages thanks to gold wires. The gas sensing properties of samples were analyzed in a wide range of working temperatures for different target gases in order to verify the best working condition. (C) 2015 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-ric-nd/4.0/) Peer-review under responsibility of the organizing committee of EUROSENSORS
Parole chiavi: niobium oxide; tungsten oxide; nanowires; thermal oxidation; chemical sensing