Fabrication and characterization of low loss MOMS resonators for cavity opto-mechanics
Authors: Serra E., Bonaldi M., Borrielli A., Marin F., Marconi L., Marino F., Pandraud G., Pontin A., Prodi G.A., Sarro P.M.
Autors Affiliation: Centre for Materials and Microsystems, Fondazione Bruno Kessler, I-38123 Povo (TN), Italy;
Dept. of Microelectronics and Computer, Engineering/ECTM/DIMES, Delft University of Technology, Feldmanweg 17, 2628 CT Delft, The Netherlands;
Istituto Nazionale di Fisica Nucleare (INFN), Trento Institute for Fundamental Physics and Application, I-38123 Povo, Trento, Italy;
Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, I-38123 Povo (TN), Italy;
Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy;
INFN, Sezione di Firenze, via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy;
CNR-Istituto Nazionale di Ottica, Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy;
Dipartimento di Fisica, Università di Trento, I-38123 Povo (TN), Italy.
Abstract: The study of the optomechanical coupling between the radiation pressure of a laser beam and a mechanical oscillator is an emerging field in quantum optics that is taking advantage of all the recent developments in micro-fabrication. The manipulation of the quantum state of light is within the reach of systems based on a Fabry-Perot cavity with a Micro-Opto-Mechanical-System (MOMS) resonators used as end-mirror. To approach the quantum regime, these micro devices must satisfy two basic requirements: low optical and mechanical losses. We have recently proposed a class of very low loss MOMS devices working in the 100 kHz frequency region, based on two-side MEMS processing bulk-micromachining. In this work we describe our latest process development, based on the used of pure aluminum as a masking layer for the optical coating during fabrication, that significantly improves the quality of the devices and the yield of the process, opening the way for their use in integrated systems for quantum optics. The devices show very high optical quality (finesse up to 10(5) can be achieved in optical cavity) and a mechanical quality factor over 10(6) at cryogenic temperatures. (C) 2015 Elsevier B.V. All rights reserved.
Journal/Review: MICROELECTRONIC ENGINEERING
Volume: 145 Pages from: 138 to: 142
More Information: This work has been supported by MIUR (PRIN 2010-2011) and by INFN (HUMOR project). A.B. acknowledges support from the MIUR under the “FIRB-Futuro in ricerca 2013” funding program, project code RBFR13QUVI. The authors gratefully acknowledge the DIMES IC process group for the technological support.KeyWords: MOMS resonators; MEMS bulk micromachining; Optomechanics; High-precision measurements; DOI: 10.1016/j.mee.2015.03.036Citations: 1data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2021-10-24References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here