Fabrication of low loss MOMS resonators for quantum optics experiments
Authors: Serra E., Bagolini A., Borrielli A., Boscardin M., Cataliotti F.S., Marin F., Marino F., Pontin A., Prodi G.A., Vannoni M., Bonaldi M.
Autors Affiliation: Interdisciplinary Laboratory for Computational Science (LISC), FBK-University of Trento, I-38123 Povo (Trento), Italy; INFN, Gruppo Collegato di Trento, Sezione di Padova, I-38123 Povo, Trento, Italy; Department of Microelectronics and Computer, Engineering/ECTM/DIMES, Feldmanweg, 17-2628 CT Delft, PO Box 5053, 2600 GB Delft, The Netherlands; Microtechnology Laboratory FBK-CMM, I-38123 Povo, Trento, Italy; Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, I-38123 Povo, Trento, Italy; European Laboratory for Non-Linear Spectroscopy (LENS), Via Carrara 1, I-50019 Sesto Fiorentino (FI), Italy; INFN, Sezione di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy; Dipartimento di Fisica e Astronomia, Università di Firenze, Via Sansone 1, I-50019 Sesto Fiorentino (FI), Italy; CNR-Istituto dei Sistemi Complessi, Via Madonna del Piano 10, I-50019 Sesto Fiorentino (FI), Italy; Dipartimento di Fisica, Università di Trento, I-38123 Povo (TN), Italy; Istituto Nazionale di Ottica-CNR, Largo Fermi 6, I-50125 Firenze, Italy
Abstract: We present the fabrication and characterization of opto-mechanical micro-resonators developed to detect radiation-pressure coupling between light and a macroscopic body. The major achievements of this work are the development of complex high aspect ratio shapes by using the deep-RIE Bosch process and the integration of a high-reflectivity dielectric mirror. The micro-resonators were used as an end-mirror of a Fabry-Perot cavity, attaining an optical finesse of about 6 x 10(4), and at cryogenic temperature (about 10 K) we measured a mechanical quality factor up to 2 x 10(6) at about 90 kHz. These features make our devices particularly suitable for experiments on quantum-opto-mechanics.
Journal/Review: JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume: 23 (8) Pages from: 085010 to: 085010
More Information: We acknowledge the support from the MEMS2 joint project of the Istituto Nazionale di Fisica Nucleare and Fondazione Bruno Kessler. AB acknowledges support from the European Research Council under the European Community\’s Seventh Framework Programme (FP7/2007-2013)/ERC grant agreement no 202680. We thank A Sordini for careful interferometric measurements of our samples.KeyWords: optical coatings; optomechanical resonators; radiation-pressure; low-temperatures; noise reductionDOI: 10.1088/0960-1317/23/8/085010Citations: 10data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2022-06-26References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here